filename:TLM__MD_M012_S042_TARGET_EXPOSE_SCAN___COUNT_120004.DAT
scan_file:SCAN_MD_M012_S042_2015-02-07T065509Z_TGT11
sw_ver:663
start_time:"2015-02-07 06:55:09.614625"
end_time:"2015-02-08 04:59:43.640276"
duration:"22:04:34.025651"
channel:ZS
tip_num:11
lin_pos:-2.1686121919584953
tip_offset:65.178664072632941
wheel_pos:176
target:11
target_type:SOLGEL
x_orig:33940
y_orig:33940
xsteps:320
x_step:66
x_step_nm:251.71343999999999
xlen_um:80.548300799999993
ysteps:320
y_step:66
y_step_nm:251.71343999999999
ylen_um:80.548300799999993
z_step:4.0
z_ret:3070
z_ret_nm:503.48000000000002
x_dir:L_H
y_dir:L_H
fast_dir:X
scan_type:DYN
exc_lvl:2
ac_gain:2
x_closed:False
y_closed:False
aborted:False
dummy:False
res_amp:9.1259632257572285
set_pt:7.3006790264744019
fadj:7.7569237811856269
ctrl_image:False
mag_phase:False
work_pt:8.21329727654516
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:24.904513672632945
y_orig_um:40.274150399999996