filename:TLM__MD_M012_S042_TARGET_EXPOSE_SCAN___COUNT_120004.DAT scan_file:SCAN_MD_M012_S042_2015-02-08T121304Z_TGT11 sw_ver:663 start_time:"2015-02-08 12:13:04.648668" end_time:"2015-02-08 17:42:47.655053" duration:"5:29:43.006385" channel:ZS tip_num:11 lin_pos:-2.1686121919584953 tip_offset:65.178664072632941 wheel_pos:176 target:11 target_type:SOLGEL x_orig:43220 y_orig:43220 xsteps:320 x_step:8 x_step_nm:30.510719999999999 xlen_um:9.763430399999999 ysteps:320 y_step:8 y_step_nm:30.510719999999999 ylen_um:9.763430399999999 z_step:4.0 z_ret:372 z_ret_nm:61.008000000000003 x_dir:L_H y_dir:L_H fast_dir:X scan_type:DYN exc_lvl:2 ac_gain:2 x_closed:False y_closed:False aborted:False dummy:False res_amp:9.0460059510185395 set_pt:7.2365911345082772 fadj:7.6888685435263611 ctrl_image:False mag_phase:False work_pt:8.141336339315243 set_pt_per:80.0 work_pt_per:-89.99923704890517 xy_settle:50 z_settle:50 x_orig_um:60.296948872632939 y_orig_um:4.8817151999999995