filename:TLM__MD_M012_S042_TARGET_EXPOSE_SCAN___COUNT_120004.DAT scan_file:SCAN_MD_M012_S042_2015-02-09T220504Z_TGT11 sw_ver:663 start_time:"2015-02-09 22:05:04.697360" end_time:"2015-02-10 03:37:26.703957" duration:"5:32:22.006597" channel:ZS tip_num:11 lin_pos:-2.2372777904936294 tip_offset:-54.986133363851721 wheel_pos:176 target:11 target_type:SOLGEL x_orig:43220 y_orig:43220 xsteps:320 x_step:8 x_step_nm:30.510719999999999 xlen_um:9.763430399999999 ysteps:320 y_step:8 y_step_nm:30.510719999999999 ylen_um:9.763430399999999 z_step:4.0 z_ret:372 z_ret_nm:61.008000000000003 x_dir:L_H y_dir:L_H fast_dir:X scan_type:DYN exc_lvl:2 ac_gain:2 x_closed:False y_closed:False aborted:False dummy:False res_amp:9.0545510032806895 set_pt:7.2436102845807575 fadj:7.6961928740367753 ctrl_image:False mag_phase:False work_pt:8.149026821156609 set_pt_per:80.0 work_pt_per:-89.99923704890517 xy_settle:50 z_settle:50 x_orig_um:-59.867848563851723 y_orig_um:4.8817151999999995