filename:TLM__MD_M012_S042_TARGET_EXPOSE_SCAN___COUNT_120004.DAT scan_file:SCAN_MD_M012_S042_2015-02-10T053415Z_TGT03 sw_ver:663 start_time:"2015-02-10 05:34:15.706276" end_time:"2015-02-10 11:17:50.713096" duration:"5:43:35.006820" channel:ZS tip_num:7 lin_pos:1.3220416571297779 tip_offset:-84.927100022888709 wheel_pos:48 target:3 target_type:CAL x_orig:43220 y_orig:43220 xsteps:256 x_step:10 x_step_nm:38.138399999999997 xlen_um:9.763430399999999 ysteps:256 y_step:10 y_step_nm:38.138399999999997 ylen_um:9.763430399999999 z_step:4.0 z_ret:930 z_ret_nm:152.52000000000001 x_dir:L_H y_dir:L_H fast_dir:X scan_type:DYN exc_lvl:4 ac_gain:5 x_closed:False y_closed:False aborted:False dummy:False res_amp:5.4451819638361183 set_pt:4.355992980849928 fadj:4.6282139314869912 ctrl_image:False mag_phase:False work_pt:4.9006222233770975 set_pt_per:80.0 work_pt_per:-89.99923704890517 xy_settle:50 z_settle:50 x_orig_um:-89.808815222888711 y_orig_um:4.8817151999999995