filename:TLM__MD_M013_S044_TARGET_EXPOSE_SCAN___COUNT_130002.DAT
scan_file:SCAN_MD_M013_S044_2015-02-18T052118Z_TGT12
sw_ver:663
start_time:"2015-02-18 05:21:18.934689"
end_time:"2015-02-18 14:22:55.945440"
duration:"9:01:37.010751"
channel:ZS
tip_num:9
lin_pos:-0.4412909132524605
tip_offset:-0.50909819180587623
wheel_pos:192
target:12
target_type:SOLGEL
x_orig:40965
y_orig:39760
xsteps:352
x_step:15
x_step_nm:57.207599999999999
xlen_um:20.137075199999998
ysteps:352
y_step:15
y_step_nm:57.207599999999999
ylen_um:20.137075199999998
z_step:4.0
z_ret:698
z_ret_nm:114.47200000000001
x_dir:L_H
y_dir:L_H
fast_dir:X
scan_type:DYN
exc_lvl:4
ac_gain:7
x_closed:False
y_closed:False
aborted:False
dummy:False
res_amp:9.2895399404898136
set_pt:7.4316014343480568
fadj:7.8960860608834977
ctrl_image:False
mag_phase:False
work_pt:8.36051507179415
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:-13.991022591805875
y_orig_um:18.077601599999998