filename:TLM__MD_M013_S044_TARGET_EXPOSE_SCAN___COUNT_130002.DAT scan_file:SCAN_MD_M013_S044_2015-02-18T164119Z_TGT12 sw_ver:663 start_time:"2015-02-18 16:41:19.948187" end_time:"2015-02-19 01:44:18.958965" duration:"9:02:59.010778" channel:ZS tip_num:9 lin_pos:-0.4412909132524605 tip_offset:-0.50909819180587623 wheel_pos:192 target:12 target_type:SOLGEL x_orig:35544 y_orig:40561 xsteps:352 x_step:15 x_step_nm:57.207599999999999 xlen_um:20.137075199999998 ysteps:352 y_step:15 y_step_nm:57.207599999999999 ylen_um:20.137075199999998 z_step:4.0 z_ret:698 z_ret_nm:114.47200000000001 x_dir:L_H y_dir:L_H fast_dir:X scan_type:DYN exc_lvl:4 ac_gain:7 x_closed:False y_closed:False aborted:False dummy:False res_amp:9.4402990768291737 set_pt:7.5521477073319616 fadj:8.0242618448157472 ctrl_image:False mag_phase:False work_pt:8.496197144281094 set_pt_per:80.0 work_pt_per:-89.99923704890517 xy_settle:50 z_settle:50 x_orig_um:-34.665849231805872 y_orig_um:15.022715759999999