filename:TLM__MD_M013_S044_TARGET_EXPOSE_SCAN___COUNT_130002.DAT
scan_file:SCAN_MD_M013_S044_2015-02-19T162440Z_TGT12
sw_ver:663
start_time:"2015-02-19 16:24:40.976440"
end_time:"2015-02-20 06:37:18.993365"
duration:"14:12:38.016925"
channel:ZS
tip_num:9
lin_pos:-0.4412909132524605
tip_offset:-0.50909819180587623
wheel_pos:192
target:12
target_type:SOLGEL
x_orig:36052
y_orig:36052
xsteps:256
x_step:66
x_step_nm:251.71343999999999
xlen_um:64.438640640000003
ysteps:256
y_step:66
y_step_nm:251.71343999999999
ylen_um:64.438640640000003
z_step:4.0
z_ret:3070
z_ret_nm:503.48000000000002
x_dir:L_H
y_dir:L_H
fast_dir:X
scan_type:DYN
exc_lvl:4
ac_gain:7
x_closed:False
y_closed:False
aborted:False
dummy:False
res_amp:9.4625772487983504
set_pt:7.5698481727321294
fadj:8.0431830319676507
ctrl_image:False
mag_phase:False
work_pt:8.516247329081796
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:-32.728418511805877
y_orig_um:32.219320320000001