filename:TLM__MD_M013_S045_TARGET_EXPOSE_SCAN___COUNT_130003.DAT
scan_file:SCAN_MD_M013_S045_2015-02-25T085716Z_TGT03
sw_ver:663
start_time:"2015-02-25 08:57:16.133870"
end_time:"2015-02-25 15:29:09.141626"
duration:"6:31:53.007756"
channel:ZS
tip_num:10
lin_pos:-1.3211261158159762
tip_offset:16.529297322041824
wheel_pos:48
target:3
target_type:CAL
x_orig:43220
y_orig:43220
xsteps:256
x_step:10
x_step_nm:38.138399999999997
xlen_um:9.763430399999999
ysteps:256
y_step:10
y_step_nm:38.138399999999997
ylen_um:9.763430399999999
z_step:4.0
z_ret:930
z_ret_nm:152.52000000000001
x_dir:L_H
y_dir:L_H
fast_dir:X
scan_type:DYN
exc_lvl:1
ac_gain:3
x_closed:False
y_closed:False
aborted:False
dummy:False
res_amp:7.3806363012130909
set_pt:5.9044785229266807
fadj:6.2734416723887989
ctrl_image:False
mag_phase:False
work_pt:6.642516360446316
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:11.647582122041822
y_orig_um:4.8817151999999995