filename:TLM__MD_M013_S045_TARGET_EXPOSE_SCAN___COUNT_130003.DAT
scan_file:SCAN_MD_M013_S045_2015-03-03T164217Z_TGT13
sw_ver:663
start_time:"2015-03-03 16:42:17.304266"
end_time:"2015-03-03 22:13:59.310595"
duration:"5:31:42.006329"
channel:ZS
tip_num:10
lin_pos:-1.2530708781567101
tip_offset:135.62596322575735
wheel_pos:208
target:13
target_type:SOLGEL
x_orig:43220
y_orig:43220
xsteps:320
x_step:8
x_step_nm:30.510719999999999
xlen_um:9.763430399999999
ysteps:320
y_step:8
y_step_nm:30.510719999999999
ylen_um:9.763430399999999
z_step:4.0
z_ret:372
z_ret_nm:61.008000000000003
x_dir:L_H
y_dir:L_H
fast_dir:X
scan_type:DYN
exc_lvl:1
ac_gain:3
x_closed:False
y_closed:False
aborted:False
dummy:False
res_amp:7.2256046387426558
set_pt:5.7802700846875723
fadj:6.1416037232013423
ctrl_image:False
mag_phase:False
work_pt:6.502989047038691
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:130.74424802575734
y_orig_um:4.8817151999999995