filename:TLM__MD_M013_S046_TARGET_EXPOSE_SCAN___COUNT_130004.DAT
scan_file:SCAN_MD_M013_S046_2015-03-04T080523Z_TGT04
sw_ver:663
start_time:"2015-03-04 08:05:23.321877"
end_time:"2015-03-04 12:19:13.326720"
duration:"4:13:50.004843"
channel:ZS
tip_num:11
lin_pos:-2.2021820401312278
tip_offset:6.4314297703511558
wheel_pos:64
target:4
target_type:SILICON
x_orig:40980
y_orig:40980
xsteps:128
x_step:55
x_step_nm:209.7612
xlen_um:26.849433600000001
ysteps:128
y_step:55
y_step_nm:209.7612
ylen_um:26.849433600000001
z_step:4.0
z_ret:3837
z_ret_nm:629.26800000000003
x_dir:L_H
y_dir:L_H
fast_dir:X
scan_type:DYN
exc_lvl:1
ac_gain:3
x_closed:False
y_closed:False
aborted:False
dummy:False
res_amp:8.1713588158999002
set_pt:6.5371175707637157
fadj:6.9454489967193105
ctrl_image:False
mag_phase:False
work_pt:7.3541605908383625
set_pt_per:80.0
work_pt_per:89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:-6.9932870296488439
y_orig_um:13.424716799999999