filename:TLM__MD_M013_S046_TARGET_EXPOSE_SCAN___COUNT_130004.DAT
scan_file:SCAN_MD_M013_S046_2015-03-04T190154Z_TGT03
sw_ver:663
start_time:"2015-03-04 19:01:54.334403"
end_time:"2015-03-05 01:02:24.341281"
duration:"6:00:30.006878"
channel:ZS
tip_num:13
lin_pos:-3.9661249713893341
tip_offset:-0.21869993133427632
wheel_pos:48
target:3
target_type:CAL
x_orig:43220
y_orig:43220
xsteps:256
x_step:10
x_step_nm:38.138399999999997
xlen_um:9.763430399999999
ysteps:256
y_step:10
y_step_nm:38.138399999999997
ylen_um:9.763430399999999
z_step:4.0
z_ret:930
z_ret_nm:152.52000000000001
x_dir:L_H
y_dir:L_H
fast_dir:X
scan_type:DYN
exc_lvl:1
ac_gain:3
x_closed:False
y_closed:False
aborted:False
dummy:False
res_amp:6.8957045853360803
set_pt:5.5165941863126573
fadj:5.8611429007400631
ctrl_image:False
mag_phase:False
work_pt:6.206081515948842
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:-5.1004151313342758
y_orig_um:4.8817151999999995