filename:TLM__MD_M013_S046_TARGET_EXPOSE_SCAN___COUNT_130004.DAT
scan_file:SCAN_MD_M013_S046_2015-03-07T041436Z_TGT11
sw_ver:663
start_time:"2015-03-07 04:14:36.399894"
end_time:"2015-03-08 04:27:38.427616"
duration:"1 day, 0:13:02.027722"
channel:ZS
tip_num:13
lin_pos:-3.9313344014648659
tip_offset:60.664797436485003
wheel_pos:176
target:11
target_type:SOLGEL
x_orig:34004
y_orig:34004
xsteps:256
x_step:82
x_step_nm:312.73487999999998
xlen_um:80.060129279999998
ysteps:256
y_step:82
y_step_nm:312.73487999999998
ylen_um:80.060129279999998
z_step:4.0
z_ret:5721
z_ret_nm:938.24400000000003
x_dir:L_H
y_dir:L_H
fast_dir:X
scan_type:DYN
exc_lvl:2
ac_gain:2
x_closed:False
y_closed:False
aborted:False
dummy:False
res_amp:7.6104371709773417
set_pt:6.088197146562905
fadj:6.4687571526665124
ctrl_image:False
mag_phase:False
work_pt:6.849335389965891
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:20.634732796485004
y_orig_um:40.030064639999999