filename:TLM__MD_M013_S046_TARGET_EXPOSE_SCAN___COUNT_130004.DAT
scan_file:SCAN_MD_M013_S046_2015-03-10T092024Z_TGT11
sw_ver:663
start_time:"2015-03-10 09:20:24.488148"
end_time:"2015-03-10 17:35:16.497589"
duration:"8:14:52.009441"
channel:ZS
tip_num:13
lin_pos:-4.0003051804379339
tip_offset:-60.034065766384032
wheel_pos:176
target:11
target_type:SOLGEL
x_orig:42580
y_orig:42580
xsteps:320
x_step:12
x_step_nm:45.766080000000002
xlen_um:14.645145599999999
ysteps:320
y_step:12
y_step_nm:45.766080000000002
ylen_um:14.645145599999999
z_step:4.0
z_ret:837
z_ret_nm:137.268
x_dir:L_H
y_dir:L_H
fast_dir:X
scan_type:DYN
exc_lvl:2
ac_gain:2
x_closed:False
y_closed:False
aborted:False
dummy:False
res_amp:7.5906004425116365
set_pt:6.0723277637903408
fadj:6.4516670481422125
ctrl_image:False
mag_phase:False
work_pt:6.831482485691293
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:-67.356638566384035
y_orig_um:7.3225727999999997