filename:TLM__MD_M014_S047_TARGET_EXPOSE_SCAN___COUNT_140001.DAT
scan_file:SCAN_MD_M014_S047_2015-03-11T041802Z_TGT03
sw_ver:663
start_time:"2015-03-11 04:18:02.509852"
end_time:"2015-03-11 10:42:28.517187"
duration:"6:24:26.007335"
channel:ZS
tip_num:9
lin_pos:-0.4412909132524605
tip_offset:-0.50909819180587623
wheel_pos:48
target:3
target_type:CAL
x_orig:43220
y_orig:43220
xsteps:256
x_step:10
x_step_nm:38.138399999999997
xlen_um:9.763430399999999
ysteps:256
y_step:10
y_step_nm:38.138399999999997
ylen_um:9.763430399999999
z_step:4.0
z_ret:930
z_ret_nm:152.52000000000001
x_dir:L_H
y_dir:L_H
fast_dir:X
scan_type:DYN
exc_lvl:4
ac_gain:7
x_closed:False
y_closed:False
aborted:False
dummy:False
res_amp:9.4564736400396718
set_pt:7.5649652857251866
fadj:8.037994964522774
ctrl_image:False
mag_phase:False
work_pt:8.510754127766536
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:-5.3908133918058754
y_orig_um:4.8817151999999995