filename:TLM__MD_M014_S047_TARGET_EXPOSE_SCAN___COUNT_140001.DAT
scan_file:SCAN_MD_M014_S047_2015-03-11T121834Z_TGT03
sw_ver:663
start_time:"2015-03-11 12:18:34.519020"
end_time:"2015-03-11 15:48:15.523021"
duration:"3:29:41.004001"
channel:ZS
tip_num:9
lin_pos:-0.4412909132524605
tip_offset:-0.50909819180587623
wheel_pos:48
target:3
target_type:CAL
x_orig:43988
y_orig:43988
xsteps:256
x_step:4
x_step_nm:15.25536
xlen_um:3.9053721599999998
ysteps:256
y_step:4
y_step_nm:15.25536
ylen_um:3.9053721599999998
z_step:4.0
z_ret:372
z_ret_nm:61.008000000000003
x_dir:L_H
y_dir:L_H
fast_dir:X
scan_type:DYN
exc_lvl:4
ac_gain:7
x_closed:False
y_closed:False
aborted:False
dummy:False
res_amp:9.508659494926377
set_pt:7.6067750057221346
fadj:8.0822461280231934
ctrl_image:False
mag_phase:False
work_pt:8.55772099901202
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:-2.4617842718058762
y_orig_um:1.9526860799999999