filename:TLM__MD_M014_S047_TARGET_EXPOSE_SCAN___COUNT_140001.DAT
scan_file:SCAN_MD_M014_S047_2015-03-11T181418Z_TGT14
sw_ver:663
start_time:"2015-03-11 18:14:18.525807"
end_time:"2015-03-12 23:27:41.559259"
duration:"1 day, 5:13:23.033452"
channel:ZS
tip_num:9
lin_pos:-0.44098573281452658
tip_offset:0.024967574578496628
wheel_pos:224
target:14
target_type:SOLGEL
x_orig:36626
y_orig:34004
xsteps:256
x_step:82
x_step_nm:312.73487999999998
xlen_um:80.060129279999998
ysteps:256
y_step:82
y_step_nm:312.73487999999998
ylen_um:80.060129279999998
z_step:4.0
z_ret:6674
z_ret_nm:1094.5360000000001
x_dir:L_H
y_dir:L_H
fast_dir:X
scan_type:DYN
exc_lvl:4
ac_gain:7
x_closed:False
y_closed:False
aborted:False
dummy:False
res_amp:9.4998092622262895
set_pt:7.5997558556496543
fadj:8.0746166170748452
ctrl_image:False
mag_phase:False
work_pt:8.549755857104888
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:-30.005208585421503
y_orig_um:40.030064639999999