filename:TLM__MD_M014_S047_TARGET_EXPOSE_SCAN___COUNT_140001.DAT
scan_file:SCAN_MD_M014_S047_2015-03-13T084438Z_TGT12
sw_ver:663
start_time:"2015-03-13 08:44:38.569885"
end_time:"2015-03-13 16:58:53.579315"
duration:"8:14:15.009430"
channel:ZS
tip_num:9
lin_pos:-0.44098573281452658
tip_offset:0.024967574578496628
wheel_pos:192
target:12
target_type:SOLGEL
x_orig:40965
y_orig:39760
xsteps:256
x_step:21
x_step_nm:80.090639999999993
xlen_um:20.503203839999998
ysteps:256
y_step:21
y_step_nm:80.090639999999993
ylen_um:20.503203839999998
z_step:4.0
z_ret:977
z_ret_nm:160.22800000000001
x_dir:L_H
y_dir:L_H
fast_dir:X
scan_type:DYN
exc_lvl:4
ac_gain:7
x_closed:False
y_closed:False
aborted:False
dummy:False
res_amp:9.4259555962462791
set_pt:7.5405508506904724
fadj:8.0120546272983901
ctrl_image:False
mag_phase:False
work_pt:8.483288121190231
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:-13.456956825421502
y_orig_um:18.077601599999998