filename:TLM__MD_M014_S047_TARGET_EXPOSE_SCAN___COUNT_140001.DAT
scan_file:SCAN_MD_M014_S047_2015-03-13T172402Z_TGT12
sw_ver:663
start_time:"2015-03-13 17:24:02.579795"
end_time:"2015-03-13 23:20:20.586592"
duration:"5:56:18.006797"
channel:ZS
tip_num:9
lin_pos:-0.44098573281452658
tip_offset:0.024967574578496628
wheel_pos:192
target:12
target_type:SOLGEL
x_orig:42465
y_orig:44001
xsteps:256
x_step:1
x_step_nm:3.8138399999999999
xlen_um:0.97634303999999994
ysteps:256
y_step:1
y_step_nm:3.8138399999999999
ylen_um:0.97634303999999994
z_step:4.0
z_ret:977
z_ret_nm:160.22800000000001
x_dir:L_H
y_dir:L_H
fast_dir:X
scan_type:DYN
exc_lvl:4
ac_gain:7
x_closed:False
y_closed:False
aborted:True
dummy:False
res_amp:9.4238193331807416
set_pt:7.5390249485008027
fadj:8.0102235446707866
ctrl_image:False
mag_phase:False
work_pt:8.48136550072989
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:-7.7361968254215023
y_orig_um:1.9031061599999999