filename:TLM__MD_M014_S047_TARGET_EXPOSE_SCAN___COUNT_140001.DAT scan_file:SCAN_MD_M014_S047_2015-03-14T101127Z_TGT14 sw_ver:663 start_time:"2015-03-14 10:11:27.599015" end_time:"2015-03-14 14:14:03.603643" duration:"4:02:36.004628" channel:ZS tip_num:9 lin_pos:-0.42999923704890519 tip_offset:19.251335164415917 wheel_pos:224 target:14 target_type:SOLGEL x_orig:34004 y_orig:34004 xsteps:64 x_step:328 x_step_nm:1250.9395199999999 xlen_um:80.060129279999998 ysteps:64 y_step:328 y_step_nm:1250.9395199999999 ylen_um:80.060129279999998 z_step:4.0 z_ret:15255 z_ret_nm:2501.8200000000002 x_dir:L_H y_dir:L_H fast_dir:X scan_type:DYN exc_lvl:4 ac_gain:7 x_closed:False y_closed:False aborted:False dummy:False res_amp:9.4616617074845486 set_pt:7.5692378118562615 fadj:8.0422674906538489 ctrl_image:False mag_phase:False work_pt:8.515423348884507 set_pt_per:80.0 work_pt_per:-89.99923704890517 xy_settle:50 z_settle:50 x_orig_um:-20.778729475584083 y_orig_um:40.030064639999999