filename:TLM__MD_M014_S048_TARGET_EXPOSE_SCAN___COUNT_140002.DAT scan_file:SCAN_MD_M014_S048_2015-03-18T043624Z_TGT13 sw_ver:663 start_time:"2015-03-18 04:36:24.702515" end_time:"2015-03-18 21:30:39.721866" duration:"16:54:15.019351" channel:ZS tip_num:10 lin_pos:-1.3220416571297779 tip_offset:14.927100022888704 wheel_pos:208 target:13 target_type:SOLGEL x_orig:34004 y_orig:34004 xsteps:256 x_step:82 x_step_nm:312.73487999999998 xlen_um:80.060129279999998 ysteps:256 y_step:82 y_step_nm:312.73487999999998 ylen_um:80.060129279999998 z_step:4.0 z_ret:3814 z_ret_nm:625.49599999999998 x_dir:L_H y_dir:L_H fast_dir:X scan_type:DYN exc_lvl:3 ac_gain:0 x_closed:False y_closed:False aborted:False dummy:False res_amp:8.159456778820477 set_pt:6.52735179674983 fadj:6.9353780422674909 ctrl_image:False mag_phase:False work_pt:7.343448848273604 set_pt_per:80.0 work_pt_per:-89.99923704890517 xy_settle:50 z_settle:50 x_orig_um:-25.102964617111297 y_orig_um:40.030064639999999