filename:TLM__MD_M014_S048_TARGET_EXPOSE_SCAN___COUNT_140002.DAT
scan_file:SCAN_MD_M014_S048_2015-03-19T031730Z_TGT03
sw_ver:663
start_time:"2015-03-19 03:17:30.728483"
end_time:"2015-03-19 09:18:47.735376"
duration:"6:01:17.006893"
channel:ZS
tip_num:10
lin_pos:-1.3220416571297779
tip_offset:14.927100022888704
wheel_pos:48
target:3
target_type:CAL
x_orig:43220
y_orig:43220
xsteps:256
x_step:10
x_step_nm:38.138399999999997
xlen_um:9.763430399999999
ysteps:256
y_step:10
y_step_nm:38.138399999999997
ylen_um:9.763430399999999
z_step:4.0
z_ret:930
z_ret_nm:152.52000000000001
x_dir:L_H
y_dir:L_H
fast_dir:X
scan_type:DYN
exc_lvl:3
ac_gain:0
x_closed:False
y_closed:False
aborted:False
dummy:False
res_amp:8.0816357671473256
set_pt:6.4650949874113053
fadj:6.8691538872358286
ctrl_image:False
mag_phase:False
work_pt:7.273410531504028
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:10.045384822888705
y_orig_um:4.8817151999999995