filename:TLM__MD_M014_S048_TARGET_EXPOSE_SCAN___COUNT_140002.DAT
scan_file:SCAN_MD_M014_S048_2015-03-21T123255Z_TGT06
sw_ver:663
start_time:"2015-03-21 12:32:55.794026"
end_time:"2015-03-22 05:20:31.813250"
duration:"16:47:36.019224"
channel:ZS
tip_num:10
lin_pos:-1.3220416571297779
tip_offset:14.927100022888704
wheel_pos:96
target:6
target_type:SILICON
x_orig:34004
y_orig:34004
xsteps:256
x_step:82
x_step_nm:312.73487999999998
xlen_um:80.060129279999998
ysteps:256
y_step:82
y_step_nm:312.73487999999998
ylen_um:80.060129279999998
z_step:4.0
z_ret:3814
z_ret_nm:625.49599999999998
x_dir:L_H
y_dir:L_H
fast_dir:X
scan_type:DYN
exc_lvl:3
ac_gain:0
x_closed:False
y_closed:False
aborted:False
dummy:False
res_amp:8.3828488593881119
set_pt:6.7061875333791114
fadj:7.1252002746623937
ctrl_image:False
mag_phase:False
work_pt:7.544500016412151
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:-25.102964617111297
y_orig_um:40.030064639999999