filename:TLM__MD_M014_S048_TARGET_EXPOSE_SCAN___COUNT_140002.DAT
scan_file:SCAN_MD_M014_S048_2015-03-22T111137Z_TGT06
sw_ver:663
start_time:"2015-03-22 11:11:37.819948"
end_time:"2015-03-22 16:19:27.825821"
duration:"5:07:50.005873"
channel:ZS
tip_num:10
lin_pos:-1.3220416571297779
tip_offset:14.927100022888704
wheel_pos:96
target:6
target_type:SILICON
x_orig:39124
y_orig:40852
xsteps:256
x_step:15
x_step_nm:57.207599999999999
xlen_um:14.645145599999999
ysteps:256
y_step:15
y_step_nm:57.207599999999999
ylen_um:14.645145599999999
z_step:4.0
z_ret:698
z_ret_nm:114.47200000000001
x_dir:L_H
y_dir:L_H
fast_dir:X
scan_type:DYN
exc_lvl:3
ac_gain:0
x_closed:False
y_closed:False
aborted:False
dummy:False
res_amp:8.1103227283131147
set_pt:6.4882887006942838
fadj:6.8935683222705428
ctrl_image:False
mag_phase:False
work_pt:7.299228577685754
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:-5.5761038171112922
y_orig_um:13.912888319999999