filename:TLM__MD_M014_S048_TARGET_EXPOSE_SCAN___COUNT_140002.DAT
scan_file:SCAN_MD_M014_S048_2015-03-22T173104Z_TGT06
sw_ver:663
start_time:"2015-03-22 17:31:04.827188"
end_time:"2015-03-22 22:36:25.833013"
duration:"5:05:21.005825"
channel:ZS
tip_num:10
lin_pos:-1.3220416571297779
tip_offset:14.927100022888704
wheel_pos:96
target:6
target_type:SILICON
x_orig:42580
y_orig:40852
xsteps:256
x_step:15
x_step_nm:57.207599999999999
xlen_um:14.645145599999999
ysteps:256
y_step:15
y_step_nm:57.207599999999999
ylen_um:14.645145599999999
z_step:4.0
z_ret:698
z_ret_nm:114.47200000000001
x_dir:L_H
y_dir:L_H
fast_dir:X
scan_type:DYN
exc_lvl:3
ac_gain:0
x_closed:False
y_closed:False
aborted:False
dummy:False
res_amp:8.356908522163728
set_pt:6.6854352635996044
fadj:7.1032272831311509
ctrl_image:False
mag_phase:False
work_pt:7.521153910822291
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:7.604527222888704
y_orig_um:13.912888319999999