filename:TLM__MD_M014_S048_TARGET_EXPOSE_SCAN___COUNT_140002.DAT
scan_file:SCAN_MD_M014_S048_2015-03-24T011708Z_TGT12
sw_ver:663
start_time:"2015-03-24 01:17:08.863553"
end_time:"2015-03-24 13:46:18.877846"
duration:"12:29:10.014293"
channel:ZS
tip_num:7
lin_pos:1.364766918440528
tip_offset:-10.157892729076124
wheel_pos:192
target:12
target_type:SOLGEL
x_orig:39220
y_orig:39220
xsteps:192
x_step:55
x_step_nm:209.7612
xlen_um:40.274150399999996
ysteps:192
y_step:55
y_step_nm:209.7612
ylen_um:40.274150399999996
z_step:4.0
z_ret:5116
z_ret_nm:839.024
x_dir:L_H
y_dir:L_H
fast_dir:X
scan_type:DYN
exc_lvl:4
ac_gain:5
x_closed:False
y_closed:False
aborted:False
dummy:False
res_amp:6.113527122911421
set_pt:4.8906691081101705
fadj:5.1964599069199657
ctrl_image:False
mag_phase:False
work_pt:5.502127767398162
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:-30.294967929076122
y_orig_um:20.137075199999998