filename:TLM__MD_M015_S051_TARGET_EXPOSE_SCAN___COUNT_150001.DAT
scan_file:SCAN_MD_M015_S051_2015-04-09T061906Z_TGT12
sw_ver:663
start_time:"2015-04-09 06:19:06.319603"
end_time:"2015-04-09 12:15:32.326633"
duration:"5:56:26.007030"
channel:ZS
tip_num:9
lin_pos:-0.44068055237659265
tip_offset:0.5590333409628695
wheel_pos:192
target:12
target_type:SOLGEL
x_orig:40965
y_orig:39760
xsteps:256
x_step:21
x_step_nm:80.090639999999993
xlen_um:20.503203839999998
ysteps:256
y_step:21
y_step_nm:80.090639999999993
ylen_um:20.503203839999998
z_step:4.0
z_ret:977
z_ret_nm:160.22800000000001
x_dir:L_H
y_dir:L_H
fast_dir:X
scan_type:DYN
exc_lvl:4
ac_gain:7
x_closed:False
y_closed:False
aborted:False
dummy:False
res_amp:9.4644083314259539
set_pt:7.571374074921799
fadj:8.0447089341573204
ctrl_image:False
mag_phase:False
work_pt:8.517895289476375
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:-12.922891059037129
y_orig_um:18.077601599999998