filename:TLM__MD_M015_S051_TARGET_EXPOSE_SCAN___COUNT_150001.DAT
scan_file:SCAN_MD_M015_S051_2015-04-12T154755Z_TGT13
sw_ver:663
start_time:"2015-04-12 15:47:55.416027"
end_time:"2015-04-13 15:42:53.444329"
duration:"23:54:58.028302"
channel:ZS
tip_num:10
lin_pos:-1.3220416571297779
tip_offset:14.927100022888704
wheel_pos:208
target:13
target_type:SOLGEL
x_orig:33972
y_orig:33972
xsteps:224
x_step:94
x_step_nm:358.50095999999996
xlen_um:80.304215040000003
ysteps:224
y_step:94
y_step_nm:358.50095999999996
ylen_um:80.304215040000003
z_step:4.0
z_ret:6558
z_ret_nm:1075.5119999999999
x_dir:L_H
y_dir:L_H
fast_dir:X
scan_type:DYN
exc_lvl:3
ac_gain:0
x_closed:False
y_closed:False
aborted:False
dummy:False
res_amp:7.9180590524147405
set_pt:2.3753719386587324
fadj:7.5219348439765028
ctrl_image:False
mag_phase:False
work_pt:7.126192736255038
set_pt_per:29.999237048905165
work_pt_per:-89.99923704890517
xy_settle:100
z_settle:100
x_orig_um:-25.225007497111292
y_orig_um:40.152107519999994