filename:TLM__MD_M015_S051_TARGET_EXPOSE_SCAN___COUNT_150001.DAT
scan_file:SCAN_MD_M015_S051_2015-04-13T212759Z_TGT02
sw_ver:663
start_time:"2015-04-13 21:27:59.451135"
end_time:"2015-04-14 02:06:20.456625"
duration:"4:38:21.005490"
channel:ZS
tip_num:9
lin_pos:-0.44098573281452658
tip_offset:0.024967574578496628
wheel_pos:32
target:2
target_type:CAL
x_orig:40000
y_orig:47077
xsteps:128
x_step:60
x_step_nm:228.8304
xlen_um:29.290291199999999
ysteps:128
y_step:60
y_step_nm:228.8304
ylen_um:29.290291199999999
z_step:4.0
z_ret:4186
z_ret_nm:686.50400000000002
x_dir:L_H
y_dir:L_H
fast_dir:X
scan_type:DYN
exc_lvl:4
ac_gain:7
x_closed:False
y_closed:False
aborted:False
dummy:False
res_amp:8.8708323796444652
set_pt:7.0965133134966045
fadj:7.5402456702525384
ctrl_image:False
mag_phase:False
work_pt:7.983681461567257
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:-17.137312425421502
y_orig_um:-9.8282656799999994