filename:TLM__MD_M015_S052_TARGET_EXPOSE_SCAN___COUNT_150002.DAT
scan_file:SCAN_MD_M015_S052_2015-04-15T090316Z_TGT10
sw_ver:663
start_time:"2015-04-15 09:03:16.497272"
end_time:"2015-04-16 07:54:57.523862"
duration:"22:51:41.026590"
channel:ZS
tip_num:5
lin_pos:3.0847638666361488
tip_offset:-80.413233386739591
wheel_pos:160
target:10
target_type:SOLGEL
x_orig:34020
y_orig:34020
xsteps:160
x_step:131
x_step_nm:499.61304000000001
xlen_um:79.938086400000003
ysteps:160
y_step:131
y_step_nm:499.61304000000001
ylen_um:79.938086400000003
z_step:4.0
z_ret:15232
z_ret_nm:2498.0480000000002
x_dir:L_H
y_dir:L_H
fast_dir:X
scan_type:DYN
exc_lvl:3
ac_gain:3
x_closed:False
y_closed:False
aborted:False
dummy:False
res_amp:5.6798657206073084
set_pt:3.4077973601892122
fadj:4.8278019378957815
ctrl_image:False
mag_phase:False
work_pt:5.111835813948877
set_pt_per:60.0
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:-120.38227658673959
y_orig_um:39.969043199999994