filename:TLM__MD_M015_S052_TARGET_EXPOSE_SCAN___COUNT_150002.DAT
scan_file:SCAN_MD_M015_S052_2015-04-16T204211Z_TGT02
sw_ver:663
start_time:"2015-04-16 20:42:11.538734"
end_time:"2015-04-17 04:31:23.547830"
duration:"7:49:12.009096"
channel:ZS
tip_num:10
lin_pos:-1.321736476691844
tip_offset:15.461165789273076
wheel_pos:32
target:2
target_type:CAL
x_orig:42580
y_orig:42580
xsteps:256
x_step:15
x_step_nm:57.207599999999999
xlen_um:14.645145599999999
ysteps:256
y_step:15
y_step_nm:57.207599999999999
ylen_um:14.645145599999999
z_step:4.0
z_ret:1395
z_ret_nm:228.78
x_dir:L_H
y_dir:L_H
fast_dir:X
scan_type:DYN
exc_lvl:3
ac_gain:0
x_closed:False
y_closed:False
aborted:False
dummy:False
res_amp:7.8564126039520872
set_pt:6.2850385290302881
fadj:6.6778057526512562
ctrl_image:False
mag_phase:False
work_pt:7.070711402970902
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:8.1385929892730768
y_orig_um:7.3225727999999997