filename:TLM__MD_M015_S053_TARGET_EXPOSE_SCAN___COUNT_150003.DAT
scan_file:SCAN_MD_M015_S053_2015-04-24T142045Z_TGT11
sw_ver:663
start_time:"2015-04-24 14:20:45.754651"
end_time:"2015-04-24 22:06:47.763685"
duration:"7:46:02.009034"
channel:ZS
tip_num:14
lin_pos:-4.847180895704585
tip_offset:-10.316567483023
wheel_pos:176
target:11
target_type:SOLGEL
x_orig:34004
y_orig:34004
xsteps:64
x_step:328
x_step_nm:1250.9395199999999
xlen_um:80.060129279999998
ysteps:64
y_step:328
y_step_nm:1250.9395199999999
ylen_um:80.060129279999998
z_step:4.0
z_ret:30511
z_ret_nm:5003.8040000000001
x_dir:L_H
y_dir:L_H
fast_dir:X
scan_type:DYN
exc_lvl:3
ac_gain:1
x_closed:False
y_closed:False
aborted:False
dummy:False
res_amp:10.0
set_pt:2.0
fadj:8.50003814755474
ctrl_image:False
mag_phase:False
work_pt:8.999923704890517
set_pt_per:20.0
work_pt_per:-89.99923704890517
xy_settle:100
z_settle:100
x_orig_um:-50.346632123022999
y_orig_um:40.030064639999999