filename:TLM__MD_M015_S053_TARGET_EXPOSE_SCAN___COUNT_150003.DAT
scan_file:SCAN_MD_M015_S053_2015-04-28T043210Z_TGT06
sw_ver:663
start_time:"2015-04-28 04:32:10.854897"
end_time:"2015-04-28 19:04:23.871805"
duration:"14:32:13.016908"
channel:ZS
tip_num:10
lin_pos:-1.321736476691844
tip_offset:15.461165789273076
wheel_pos:96
target:6
target_type:SILICON
x_orig:33972
y_orig:33972
xsteps:224
x_step:94
x_step_nm:358.50095999999996
xlen_um:80.304215040000003
ysteps:224
y_step:94
y_step_nm:358.50095999999996
ylen_um:80.304215040000003
z_step:4.0
z_ret:4350
z_ret_nm:713.39999999999998
x_dir:L_H
y_dir:L_H
fast_dir:X
scan_type:DYN
exc_lvl:3
ac_gain:0
x_closed:False
y_closed:False
aborted:False
dummy:False
res_amp:7.8490882734416729
set_pt:1.962157625696193
fadj:6.6713969634546437
ctrl_image:False
mag_phase:False
work_pt:7.064119561392589
set_pt_per:25.000381475547417
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:-24.690941730726919
y_orig_um:40.152107519999994