filename:TLM__MD_M015_S054_TARGET_EXPOSE_SCAN___COUNT_150004.DAT scan_file:SCAN_MD_M015_S054_2015-05-04T011359Z_TGT21 sw_ver:663 start_time:"2015-05-04 01:13:59.018538" end_time:"2015-05-04 18:16:16.038355" duration:"17:02:17.019817" channel:ZS tip_num:10 lin_pos:-1.321736476691844 tip_offset:15.461165789273076 wheel_pos:336 target:21 target_type:SOLGEL x_orig:34004 y_orig:34004 xsteps:256 x_step:82 x_step_nm:312.73487999999998 xlen_um:80.060129279999998 ysteps:256 y_step:82 y_step_nm:312.73487999999998 ylen_um:80.060129279999998 z_step:4.0 z_ret:3814 z_ret_nm:625.49599999999998 x_dir:L_H y_dir:L_H fast_dir:X scan_type:DYN exc_lvl:3 ac_gain:0 x_closed:False y_closed:False aborted:False dummy:False res_amp:7.9491874570840011 set_pt:1.5895323109788659 fadj:6.7565423056382095 ctrl_image:False mag_phase:False work_pt:7.1542080629628675 set_pt_per:20.0 work_pt_per:-89.99923704890517 xy_settle:50 z_settle:50 x_orig_um:-24.568898850726924 y_orig_um:40.030064639999999