filename:TLM__MD_M016_S055_TARGET_EXPOSE_SCAN___COUNT_160001.DAT
scan_file:SCAN_MD_M016_S055_2015-05-06T081548Z_TGT14
sw_ver:663
start_time:"2015-05-06 08:15:48.082543"
end_time:"2015-05-07 06:56:56.108928"
duration:"22:41:08.026385"
channel:ZS
tip_num:14
lin_pos:-4.8468757152666511
tip_offset:-9.7825017166386274
wheel_pos:224
target:14
target_type:SOLGEL
x_orig:34004
y_orig:34004
xsteps:256
x_step:82
x_step_nm:312.73487999999998
xlen_um:80.060129279999998
ysteps:256
y_step:82
y_step_nm:312.73487999999998
ylen_um:80.060129279999998
z_step:4.0
z_ret:4767
z_ret_nm:781.78800000000001
x_dir:L_H
y_dir:L_H
fast_dir:X
scan_type:DYN
exc_lvl:3
ac_gain:1
x_closed:False
y_closed:False
aborted:False
dummy:False
res_amp:10.0
set_pt:2.4998855573357748
fadj:8.50003814755474
ctrl_image:False
mag_phase:False
work_pt:8.999923704890517
set_pt_per:25.000381475547417
work_pt_per:-89.99923704890517
xy_settle:100
z_settle:100
x_orig_um:-49.812566356638627
y_orig_um:40.030064639999999