filename:TLM__MD_M016_S055_TARGET_EXPOSE_SCAN___COUNT_160001.DAT
scan_file:SCAN_MD_M016_S055_2015-05-07T142604Z_TGT14
sw_ver:663
start_time:"2015-05-07 14:26:04.117634"
end_time:"2015-05-08 12:56:19.148612"
duration:"22:30:15.030978"
channel:ZS
tip_num:14
lin_pos:-4.8468757152666511
tip_offset:-9.7825017166386274
wheel_pos:224
target:14
target_type:SOLGEL
x_orig:41421
y_orig:52286
xsteps:256
x_step:1
x_step_nm:3.8138399999999999
xlen_um:0.97634303999999994
ysteps:256
y_step:1
y_step_nm:3.8138399999999999
ylen_um:0.97634303999999994
z_step:4.0
z_ret:4767
z_ret_nm:781.78800000000001
x_dir:L_H
y_dir:L_H
fast_dir:X
scan_type:DYN
exc_lvl:2
ac_gain:2
x_closed:False
y_closed:False
aborted:False
dummy:False
res_amp:7.0382238498512244
set_pt:5.6304264896620122
fadj:5.9822995345998322
ctrl_image:False
mag_phase:False
work_pt:6.3343477666601835
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:100
z_settle:100
x_orig_um:-21.525315076638627
y_orig_um:-29.694558239999999