filename:TLM__MD_M016_S055_TARGET_EXPOSE_SCAN___COUNT_160001.DAT
scan_file:SCAN_MD_M016_S055_2015-05-10T154042Z_TGT11
sw_ver:663
start_time:"2015-05-10 15:40:42.208772"
end_time:"2015-05-11 18:12:46.240233"
duration:"1 day, 2:32:04.031461"
channel:ZS
tip_num:14
lin_pos:-4.847180895704585
tip_offset:-10.316567483023
wheel_pos:176
target:11
target_type:SOLGEL
x_orig:34004
y_orig:34004
xsteps:256
x_step:82
x_step_nm:312.73487999999998
xlen_um:80.060129279999998
ysteps:256
y_step:82
y_step_nm:312.73487999999998
ylen_um:80.060129279999998
z_step:4.0
z_ret:5721
z_ret_nm:938.24400000000003
x_dir:L_H
y_dir:L_H
fast_dir:X
scan_type:DYN
exc_lvl:3
ac_gain:1
x_closed:False
y_closed:False
aborted:False
dummy:False
res_amp:10.0
set_pt:2.0
fadj:8.50003814755474
ctrl_image:False
mag_phase:False
work_pt:8.999923704890517
set_pt_per:20.0
work_pt_per:-89.99923704890517
xy_settle:100
z_settle:100
x_orig_um:-50.346632123022999
y_orig_um:40.030064639999999