filename:TLM__MD_M016_S055_TARGET_EXPOSE_SCAN___COUNT_160001.DAT
scan_file:SCAN_MD_M016_S055_2015-05-12T152040Z_TGT12
sw_ver:663
start_time:"2015-05-12 15:20:40.265288"
end_time:"2015-05-12 21:38:28.272753"
duration:"6:17:48.007465"
channel:ZS
tip_num:7
lin_pos:1.402609292744335
tip_offset:56.066262302586097
wheel_pos:192
target:12
target_type:SOLGEL
x_orig:39220
y_orig:39220
xsteps:160
x_step:66
x_step_nm:251.71343999999999
xlen_um:40.274150399999996
ysteps:160
y_step:66
y_step_nm:251.71343999999999
ylen_um:40.274150399999996
z_step:4.0
z_ret:3530
z_ret_nm:578.92000000000007
x_dir:L_H
y_dir:L_H
fast_dir:X
scan_type:DYN
exc_lvl:4
ac_gain:5
x_closed:False
y_closed:False
aborted:False
dummy:False
res_amp:4.1557946135652699
set_pt:3.32448310063325
fadj:3.5323109788662546
ctrl_image:False
mag_phase:False
work_pt:3.7401834455282397
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:35.929187102586098
y_orig_um:20.137075199999998