filename:TLM__MD_M016_S056_TARGET_EXPOSE_SCAN___COUNT_160002.DAT
scan_file:SCAN_MD_M016_S056_2015-05-14T001426Z_TGT02
sw_ver:663
start_time:"2015-05-14 00:14:26.304291"
end_time:"2015-05-14 08:39:26.314271"
duration:"8:25:00.009980"
channel:ZS
tip_num:14
lin_pos:-4.847180895704585
tip_offset:-10.316567483023
wheel_pos:32
target:2
target_type:CAL
x_orig:42580
y_orig:42580
xsteps:320
x_step:12
x_step_nm:45.766080000000002
xlen_um:14.645145599999999
ysteps:320
y_step:12
y_step_nm:45.766080000000002
ylen_um:14.645145599999999
z_step:4.0
z_ret:837
z_ret_nm:137.268
x_dir:L_H
y_dir:L_H
fast_dir:X
scan_type:DYN
exc_lvl:3
ac_gain:1
x_closed:False
y_closed:False
aborted:False
dummy:False
res_amp:10.0
set_pt:7.999847409781033
fadj:8.50003814755474
ctrl_image:False
mag_phase:False
work_pt:8.999923704890517
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:-17.639140283023
y_orig_um:7.3225727999999997