filename:TLM__MD_M016_S056_TARGET_EXPOSE_SCAN___COUNT_160002.DAT
scan_file:SCAN_MD_M016_S056_2015-05-14T123027Z_TGT12
sw_ver:663
start_time:"2015-05-14 12:30:27.318836"
end_time:"2015-05-15 14:58:13.350212"
duration:"1 day, 2:27:46.031376"
channel:ZS
tip_num:9
lin_pos:-0.44037537193865872
tip_offset:1.0930991073472422
wheel_pos:192
target:12
target_type:SOLGEL
x_orig:34996
y_orig:33940
xsteps:288
x_step:66
x_step_nm:251.71343999999999
xlen_um:72.493470719999991
ysteps:320
y_step:66
y_step_nm:251.71343999999999
ylen_um:80.548300799999993
z_step:4.0
z_ret:4298
z_ret_nm:704.87200000000007
x_dir:L_H
y_dir:L_H
fast_dir:X
scan_type:DYN
exc_lvl:4
ac_gain:7
x_closed:False
y_closed:False
aborted:False
dummy:False
res_amp:8.506446936751356
set_pt:6.8050659952697039
fadj:7.2304875257495986
ctrl_image:False
mag_phase:False
work_pt:7.655737343046186
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:-35.153636252652753
y_orig_um:40.274150399999996