filename:TLM__MD_M016_S056_TARGET_EXPOSE_SCAN___COUNT_160002.DAT
scan_file:SCAN_MD_M016_S056_2015-05-17T171742Z_TGT02
sw_ver:663
start_time:"2015-05-17 17:17:42.409880"
end_time:"2015-05-18 04:45:16.423467"
duration:"11:27:34.013587"
channel:ZS
tip_num:9
lin_pos:-0.4412909132524605
tip_offset:-0.50909819180587623
wheel_pos:32
target:2
target_type:CAL
x_orig:32000
y_orig:32000
xsteps:128
x_step:160
x_step_nm:610.21439999999996
xlen_um:78.107443199999992
ysteps:128
y_step:160
y_step_nm:610.21439999999996
ylen_um:78.107443199999992
z_step:4.0
z_ret:11162
z_ret_nm:1830.568
x_dir:L_H
y_dir:L_H
fast_dir:X
scan_type:DYN
exc_lvl:4
ac_gain:7
x_closed:False
y_closed:False
aborted:False
dummy:False
res_amp:8.8870069428549634
set_pt:7.1096360723277634
fadj:7.5539787899595652
ctrl_image:False
mag_phase:False
work_pt:7.998238445052699
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:-48.182098191805871
y_orig_um:47.672999999999995