filename:TLM__MD_M016_S056_TARGET_EXPOSE_SCAN___COUNT_160002.DAT
scan_file:SCAN_MD_M016_S056_2015-05-18T101321Z_TGT10
sw_ver:663
start_time:"2015-05-18 10:13:21.429950"
end_time:"2015-05-19 18:26:44.459195"
duration:"1 day, 8:13:23.029245"
channel:ZS
tip_num:7
lin_pos:1.4187838559548334
tip_offset:84.371747920958256
wheel_pos:160
target:10
target_type:SOLGEL
x_orig:34004
y_orig:34004
xsteps:256
x_step:82
x_step_nm:312.73487999999998
xlen_um:80.060129279999998
ysteps:256
y_step:82
y_step_nm:312.73487999999998
ylen_um:80.060129279999998
z_step:4.0
z_ret:6674
z_ret_nm:1094.5360000000001
x_dir:L_H
y_dir:L_H
fast_dir:X
scan_type:DYN
exc_lvl:4
ac_gain:5
x_closed:False
y_closed:False
aborted:False
dummy:False
res_amp:3.2765697718776234
set_pt:2.6210421911955439
fadj:2.7849240863660647
ctrl_image:False
mag_phase:False
work_pt:2.9488877960649136
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:44.34168328095825
y_orig_um:40.030064639999999