filename:TLM__MD_M016_S057_TARGET_EXPOSE_SCAN___COUNT_160003.DAT
scan_file:SCAN_MD_M016_S057_2015-05-20T082753Z_TGT13
sw_ver:663
start_time:"2015-05-20 08:27:53.475421"
end_time:"2015-05-21 08:23:02.503105"
duration:"23:55:09.027684"
channel:ZS
tip_num:10
lin_pos:-1.3220416571297779
tip_offset:14.927100022888704
wheel_pos:208
target:13
target_type:SOLGEL
x_orig:33972
y_orig:33972
xsteps:224
x_step:94
x_step_nm:358.50095999999996
xlen_um:80.304215040000003
ysteps:224
y_step:94
y_step_nm:358.50095999999996
ylen_um:80.304215040000003
z_step:4.0
z_ret:6558
z_ret_nm:1075.5119999999999
x_dir:L_H
y_dir:L_H
fast_dir:X
scan_type:DYN
exc_lvl:3
ac_gain:0
x_closed:False
y_closed:False
aborted:False
dummy:False
res_amp:7.7666895551995125
set_pt:1.5532158388647286
fadj:7.3778896772716855
ctrl_image:False
mag_phase:False
work_pt:6.989961343636568
set_pt_per:20.0
work_pt_per:-89.99923704890517
xy_settle:100
z_settle:100
x_orig_um:-25.225007497111292
y_orig_um:40.152107519999994