filename:TLM__MD_M016_S057_TARGET_EXPOSE_SCAN___COUNT_160003.DAT
scan_file:SCAN_MD_M016_S057_2015-05-23T202506Z_TGT12
sw_ver:663
start_time:"2015-05-23 20:25:06.572590"
end_time:"2015-05-24 20:24:45.600360"
duration:"23:59:39.027770"
channel:ZS
tip_num:10
lin_pos:-1.3220416571297779
tip_offset:14.927100022888704
wheel_pos:192
target:12
target_type:SOLGEL
x_orig:33972
y_orig:33972
xsteps:224
x_step:94
x_step_nm:358.50095999999996
xlen_um:80.304215040000003
ysteps:224
y_step:94
y_step_nm:358.50095999999996
ylen_um:80.304215040000003
z_step:4.0
z_ret:6558
z_ret_nm:1075.5119999999999
x_dir:L_H
y_dir:L_H
fast_dir:X
scan_type:DYN
exc_lvl:3
ac_gain:0
x_closed:False
y_closed:False
aborted:False
dummy:False
res_amp:7.8579385061417568
set_pt:1.5715266651407642
fadj:7.4648661020828548
ctrl_image:False
mag_phase:False
work_pt:5.500616906527093
set_pt_per:20.0
work_pt_per:-70.00076295109483
xy_settle:100
z_settle:100
x_orig_um:-25.225007497111292
y_orig_um:40.152107519999994