filename:TLM__MD_M016_S057_TARGET_EXPOSE_SCAN___COUNT_160003.DAT
scan_file:SCAN_MD_M016_S057_2015-05-25T031225Z_TGT06
sw_ver:663
start_time:"2015-05-25 03:12:25.608224"
end_time:"2015-05-25 21:37:09.629535"
duration:"18:24:44.021311"
channel:ZS
tip_num:10
lin_pos:-1.3220416571297779
tip_offset:14.927100022888704
wheel_pos:96
target:6
target_type:SILICON
x_orig:33972
y_orig:33972
xsteps:224
x_step:94
x_step_nm:358.50095999999996
xlen_um:80.304215040000003
ysteps:224
y_step:94
y_step_nm:358.50095999999996
ylen_um:80.304215040000003
z_step:4.0
z_ret:4372
z_ret_nm:717.00800000000004
x_dir:L_H
y_dir:L_H
fast_dir:X
scan_type:DYN
exc_lvl:3
ac_gain:0
x_closed:False
y_closed:False
aborted:False
dummy:False
res_amp:7.8637369344625014
set_pt:1.9658197909514001
fadj:7.4703593499656655
ctrl_image:False
mag_phase:False
work_pt:4.718242160677501
set_pt_per:25.000381475547417
work_pt_per:-60.0
xy_settle:100
z_settle:100
x_orig_um:-25.225007497111292
y_orig_um:40.152107519999994