filename:TLM__MD_M016_S058_TARGET_EXPOSE_SCAN___COUNT_160004.DAT scan_file:SCAN_MD_M016_S058_2015-06-01T183208Z_TGT12 sw_ver:664 start_time:"2015-06-01 18:32:08.834287" end_time:"2015-06-02 08:53:37.851441" duration:"14:21:29.017154" channel:ZS tip_num:10 lin_pos:-1.3220416571297779 tip_offset:14.927100022888704 wheel_pos:192 target:12 target_type:SOLGEL x_orig:50376 y_orig:33222 xsteps:288 x_step:22 x_step_nm:83.904479999999992 xlen_um:24.164490239999999 ysteps:288 y_step:22 y_step_nm:83.904479999999992 ylen_um:24.164490239999999 z_step: z_ret:1535 z_ret_nm:251.74000000000001 x_dir:L_H y_dir:L_H fast_dir:X scan_type:DYN exc_lvl:3 ac_gain:0 x_closed:False y_closed:False aborted:False dummy:False res_amp:7.8498512245365069 set_pt:3.9246204318303195 fadj:7.4570840009155415 ctrl_image:False mag_phase:False work_pt: set_pt_per: work_pt_per: xy_settle: z_settle: x_orig_um:37.337223862888706 y_orig_um:43.012487520000001