filename:TLM__MD_M016_S058_TARGET_EXPOSE_SCAN___COUNT_160004.DAT
scan_file:SCAN_MD_M016_S058_2015-06-02T111414Z_TGT02
sw_ver:664
start_time:"2015-06-02 11:14:14.854241"
end_time:"2015-06-02 20:36:22.865434"
duration:"9:22:08.011193"
channel:ZS
tip_num:10
lin_pos:-1.3220416571297779
tip_offset:14.927100022888704
wheel_pos:32
target:2
target_type:CAL
x_orig:42580
y_orig:42580
xsteps:256
x_step:15
x_step_nm:57.207599999999999
xlen_um:14.645145599999999
ysteps:256
y_step:15
y_step_nm:57.207599999999999
ylen_um:14.645145599999999
z_step:
z_ret:1395
z_ret_nm:228.78
x_dir:L_H
y_dir:L_H
fast_dir:X
scan_type:DYN
exc_lvl:3
ac_gain:0
x_closed:False
y_closed:False
aborted:False
dummy:False
res_amp:7.7186236362249181
set_pt:6.1747158007171743
fadj:6.5604638742656594
ctrl_image:False
mag_phase:False
work_pt:
set_pt_per:
work_pt_per:
xy_settle:
z_settle:
x_orig_um:7.604527222888704
y_orig_um:7.3225727999999997