filename:TLM__MD_M017_S059_TARGET_EXPOSE_SCAN___COUNT_170001.DAT
scan_file:SCAN_MD_M017_S059_2015-06-03T192922Z_TGT01
sw_ver:664
start_time:"2015-06-03 19:29:22.892772"
end_time:"2015-06-04 01:22:54.899812"
duration:"5:53:32.007040"
channel:ZS
tip_num:6
lin_pos:2.4026855878538185
tip_offset:264.44977874418259
wheel_pos:16
target:1
target_type:CAL
x_orig:39252
y_orig:34004
xsteps:64
x_step:164
x_step_nm:625.46975999999995
xlen_um:40.030064639999999
ysteps:128
y_step:164
y_step_nm:625.46975999999995
ylen_um:80.060129279999998
z_step:4.0
z_ret:11442
z_ret_nm:1876.4880000000001
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:3
ac_gain:4
x_closed:False
y_closed:False
aborted:False
dummy:False
res_amp:5.6122682536049435
set_pt:4.4898146028839552
fadj:4.7702754253452353
ctrl_image:False
mag_phase:False
work_pt:5.050998609382364
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:244.43474642418261
y_orig_um:40.030064639999999