filename:TLM__MD_M017_S059_TARGET_EXPOSE_SCAN___COUNT_170001.DAT
scan_file:SCAN_MD_M017_S059_2015-06-04T133010Z_TGT11
sw_ver:664
start_time:"2015-06-04 13:30:10.914293"
end_time:"2015-06-05 18:49:00.949314"
duration:"1 day, 5:18:50.035021"
channel:ZS
tip_num:14
lin_pos:-4.847180895704585
tip_offset:-10.316567483023
wheel_pos:176
target:11
target_type:SOLGEL
x_orig:34004
y_orig:34004
xsteps:256
x_step:82
x_step_nm:312.73487999999998
xlen_um:80.060129279999998
ysteps:256
y_step:82
y_step_nm:312.73487999999998
ylen_um:80.060129279999998
z_step:4.0
z_ret:5721
z_ret_nm:938.24400000000003
x_dir:L_H
y_dir:L_H
fast_dir:X
scan_type:DYN
exc_lvl:3
ac_gain:1
x_closed:False
y_closed:False
aborted:False
dummy:False
res_amp:9.999847409781033
set_pt:1.999847409781033
fadj:8.4998855573357748
ctrl_image:False
mag_phase:False
work_pt:4.999847410945223
set_pt_per:20.0
work_pt_per:49.99923704890517
xy_settle:100
z_settle:100
x_orig_um:-50.346632123022999
y_orig_um:40.030064639999999