filename:TLM__MD_M017_S059_TARGET_EXPOSE_SCAN___COUNT_170001.DAT
scan_file:SCAN_MD_M017_S059_2015-06-06T085946Z_TGT04
sw_ver:664
start_time:"2015-06-06 08:59:46.966254"
end_time:"2015-06-07 10:07:28.996275"
duration:"1 day, 1:07:42.030021"
channel:ZS
tip_num:8
lin_pos:0.44098573281452658
tip_offset:-60.024967574578497
wheel_pos:64
target:4
target_type:SILICON
x_orig:34004
y_orig:34004
xsteps:256
x_step:82
x_step_nm:312.73487999999998
xlen_um:80.060129279999998
ysteps:256
y_step:82
y_step_nm:312.73487999999998
ylen_um:80.060129279999998
z_step:4.0
z_ret:5721
z_ret_nm:938.24400000000003
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:CON
exc_lvl:6
ac_gain:3
x_closed:False
y_closed:False
aborted:False
dummy:False
res_amp:1.0489051651789121
set_pt:0.52429999237048908
fadj:0.89143205920500501
ctrl_image:False
mag_phase:False
work_pt:0.9440066460275794
set_pt_per:50.000762951094835
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:-100.05503221457849
y_orig_um:40.030064639999999