filename:TLM__MD_M017_S059_TARGET_EXPOSE_SCAN___COUNT_170001.DAT
scan_file:SCAN_MD_M017_S059_2015-06-07T190452Z_TGT21
sw_ver:664
start_time:"2015-06-07 19:04:52.006975"
end_time:"2015-06-08 12:59:46.028378"
duration:"17:54:54.021403"
channel:ZS
tip_num:10
lin_pos:-1.3220416571297779
tip_offset:14.927100022888704
wheel_pos:336
target:21
target_type:SOLGEL
x_orig:34004
y_orig:34004
xsteps:256
x_step:82
x_step_nm:312.73487999999998
xlen_um:80.060129279999998
ysteps:256
y_step:82
y_step_nm:312.73487999999998
ylen_um:80.060129279999998
z_step:4.0
z_ret:3814
z_ret_nm:625.49599999999998
x_dir:L_H
y_dir:L_H
fast_dir:X
scan_type:DYN
exc_lvl:3
ac_gain:0
x_closed:False
y_closed:False
aborted:False
dummy:False
res_amp:7.5999084458686195
set_pt:1.5197985809109635
fadj:6.4597543297474633
ctrl_image:False
mag_phase:False
work_pt:6.839859617697064
set_pt_per:20.0
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:-25.102964617111297
y_orig_um:40.030064639999999